Systems and methods for a gas field ionization source

摘要

In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.

主权项

1. An ion source, comprising:
an emitter having a distal end that tapers to an atomic shelf including a number of atoms, a first gas source for delivering an imaging gas to a region near the distal end, a voltage source in electrical connection with the emitter for generating an electric field near the distal end of the emitter, thereby generating a particle beam from a region near the atomic shelf of the emitter and traveling in a direction away from the distal end of the emitter, and a second gas source for delivering a promoting gas wherein the promoting gas reacts with the emitter to shape the distal end.