METAL ABSORPTION GRATING AND TALBOT INTERFEROMETER

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a microstructure in which a metal microstructure with high aspect ratio can be obtained highly accurately and easily.SOLUTION: A manufacturing method of a microstructure has: a first process in which a first insulation film is formed on an Si substrate; a second process in which a part of the first insulation film is removed to expose the Si surface; a third process in which the Si substrate is etched from the exposed Si surface to form recesses; a fourth process in which a second insulation film is formed on sidewalls and bottom parts of the recesses; a fifth process in which at least a part of the second insulation film formed on the bottom parts of the recesses is removed to form an exposed surface of Si; and a sixth process in which metal is filled into the recesses from the exposed surface of Si by electrolytic plating.