| 摘要 |
In this pressure-sensor chip, an unjoined region (SA) that connects to the periphery of a pressure-introducing hole (11-2b) is provided inside a stopper member (11-2). A plurality of protrusions (12) are formed in a discrete manner on a first surface (PL1) and/or a second surface (PL2) that face each other in the aforementioned unjoined region (SA), and passages (13) between said protrusions (12) are used as connecting passages between the periphery of the pressure-introducing hole (11-2b) and the outer edge (14) of the unjoined region (SA). This prevents stress from becoming concentrated at a diaphragm edge and thus ensures that the expected withstand pressure is achieved. |
