MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, AND TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To improve a degree of freedom in designing an electronic element such as a high-efficiency multi-joint thin film solar cell by manufacturing an electronic element such as a stand-alone thin film solar cell for which a support substrate is not required, by directly or indirectly exfoliating a plurality of graphene layers formed on a substrate from a surface of the substrate without substantially impairing the properties thereof.SOLUTION: A manufacturing method of a semiconductor device includes: forming the plurality of graphene layers on the substrate; forming the semiconductor device including a semiconductor film on the graphene layer; and then directly or indirectly exfoliating the graphene layer from the substrate and making the exfoliated graphene layer into a transparent conductive film, thereby manufacturing the semiconductor device including the semiconductor film.