发明名称 |
MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY |
摘要 |
The present invention relates to a method for manufacturing an array substrate for a liquid crystal display device and, more specifically, to a method for manufacturing an array substrate for a liquid crystal display device including a step of collectively etching a silicon thin film, an amorphous silicon (n+ a-Si:H) thin film especially including impurities, and a pure amorphous silicon (a-Si:H) thin film and to an etchant composite used for the collective etching. |
申请公布号 |
KR20150113621(A) |
申请公布日期 |
2015.10.08 |
申请号 |
KR20140037834 |
申请日期 |
2014.03.31 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
KIM, DONG KI;KWON, O BYOUNG;LEE, JI YEON |
分类号 |
G02F1/136;C09K13/00;H01L29/786 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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