发明名称 |
PHOTOCURABLE TRANSFER SHEET, AND METHOD FOR FORMING RECESSED AND PROJECTED PATTERN USING SAME |
摘要 |
<p>The present invention is to provide a photo-curable transfer sheet suitable for the preparation of an intermediate stamper in a nanoimprint method, in which the mold release properties from a mold having a fine concave-convex pattern used in the preparation of the intermediate stamper and the mold release properties of a cured photo-curable resin that is a product having a fine concave-convex pattern transferred from the intermediate stamper are excellent, and the transfer property of the fine concave-convex pattern is good; and a method for forming a concave-convex pattern by using the above-mentioned photo-curable transfer sheet. The photo-curable transfer sheet 10 having a photo-curable transfer layer 11 comprising a photo-curable composition deformable by application of pressure which comprises a polymer and a reactive diluent having a photopolymerizable functional group, wherein the polymer is an acrylic resin comprising a recurring unit derived from (meth)acrylate having an alicyclic group.</p> |
申请公布号 |
EP2479779(A4) |
申请公布日期 |
2015.10.07 |
申请号 |
EP20100817236 |
申请日期 |
2010.09.16 |
申请人 |
BRIDGESTONE CORPORATION |
发明人 |
INAMIYA TAKATO;HASHIMOTO MASASHI;KAIDA EIZOU |
分类号 |
H01L21/027;B29C33/38;B29C59/02;B29K33/04;B32B3/26;B32B3/30;B32B27/30 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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