发明名称 PHOTOCURABLE TRANSFER SHEET, AND METHOD FOR FORMING RECESSED AND PROJECTED PATTERN USING SAME
摘要 <p>The present invention is to provide a photo-curable transfer sheet suitable for the preparation of an intermediate stamper in a nanoimprint method, in which the mold release properties from a mold having a fine concave-convex pattern used in the preparation of the intermediate stamper and the mold release properties of a cured photo-curable resin that is a product having a fine concave-convex pattern transferred from the intermediate stamper are excellent, and the transfer property of the fine concave-convex pattern is good; and a method for forming a concave-convex pattern by using the above-mentioned photo-curable transfer sheet. The photo-curable transfer sheet 10 having a photo-curable transfer layer 11 comprising a photo-curable composition deformable by application of pressure which comprises a polymer and a reactive diluent having a photopolymerizable functional group, wherein the polymer is an acrylic resin comprising a recurring unit derived from (meth)acrylate having an alicyclic group.</p>
申请公布号 EP2479779(A4) 申请公布日期 2015.10.07
申请号 EP20100817236 申请日期 2010.09.16
申请人 BRIDGESTONE CORPORATION 发明人 INAMIYA TAKATO;HASHIMOTO MASASHI;KAIDA EIZOU
分类号 H01L21/027;B29C33/38;B29C59/02;B29K33/04;B32B3/26;B32B3/30;B32B27/30 主分类号 H01L21/027
代理机构 代理人
主权项
地址