Aerostatic air bearing, assembling method thereof, and aerostatic lead screw actuator using the same

摘要

Disclosed is an aerostatic air bearing. The disclosed aerostatic air bearing includes: an aerostatic nut, said aerostatic nut including a housing having an air inlet disposed therein, a helical plenum chamber disposed in said housing, said helical plenum chamber being fluidly connected to the air inlet and fluidly interconnecting a plurality of openings, said openings being disposed in a helical pattern, and a plurality of porous media, each of said porous media being disposed in one of the plurality of openings respectively; and a lead screw coupled to said aerostatic nut, said lead screw including a threaded surface separated from each of the plurality of porous media.

主权项

1. An aerostatic air bearing, comprising:
an aerostatic nut; and a lead screw coupled to said aerostatic nut, wherein said aerostatic nut comprises:
a housing having an air inlet disposed therein;a helical plenum chamber disposed in said housing, said helical plenum chamber being fluidly connected to the air inlet and fluidly interconnecting a plurality of openings, said openings being disposed in a helical pattern; anda plurality of porous media, each of said porous media being disposed in one of the plurality of openings respectively, and wherein said lead screw comprises a threaded surface separated from each of the plurality of porous media.