METHOD OF FORMING PATTERN OR THIN FILM OF GELATINOUS AMORPHOUS COMPOUND, MICRO CAPILLARY ELECTROLYSIS PATTERNING DEVICE, AND METHOD OF FORMING PATTERN OR THIN FILM OF METAL CONDUCTOR AND METAL OXIDE

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a pattern of gelatinous amorphous compound which is formed by coordination of a plurality of carboxyl groups on a metal element, with simplified process.SOLUTION: A pattern or thin film formation method is provided which uses a micro capillary electrolysis patterning device 1 that comprises: a micro electrolysis tank 3 which is formed into a hollow columnar shape having 1 or more of an aspect ratio (h/w) of height (h) and length of one side (w) and which has a fine opening 22 in a tip end of a lower part, and whose inner surface serves as an anode electrode 23; and a micro columnar cathode electrode 25. The method comprises: supplying a reaction aqueous solution 38 in which carboxylic acid of a metal element, alkaline metal carboxylate, and lactam-based compound are solved, to the micro electrolysis tank 3 and generating the gelatinous amorphous compound which is formed by coordination of a plurality of carboxyl groups on the metal element; and discharging the gelatinous amorphous compound from the opening 22 in the tip end of the micro electrolysis tank 3 toward a base material 36, thereby forming a pattern or thin film of a fine gelatinous amorphous compound.