ION INJECTION DEVICE, BEAM ENERGY MEASUREMENT DEVICE, AND BEAM ENERGY MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To measure ion beam energy in an ion injection device.SOLUTION: A beam energy measurement device 200 in an ion injection device 100 comprises: a parallelization degree measurement part 202 which measures a degree of parallelization of an ion beam at a location downstream of a beam parallelizer 36 in the ion injection device 100; and an energy calculation part 204 which calculates the energy of the ion beam on the basis of the degree of parallelization thus measured. The ion injection device 100 may further comprise a control part which controls, on the basis of the energy of the ion beam thus calculated, a high-energy multistage linear acceleration unit 14 in such a manner that the ion beam may have target energy.