发明名称 BUILT-UP SEALED CHAMBER
摘要 <p>PROBLEM TO BE SOLVED: To provide a built-up sealed chamber capable of obtaining sufficient required mechanical strength and manufactured at low cost without requiring a dedicated large-sized cutting machine when a large-sized sealed chamber is manufactured.SOLUTION: The built-up sealed chamber capable of joining a plurality of chamber wall members 10a to form a space sealed inside comprises: a chamber wall member 10 used as the upper surface; a chamber wall member 10 used as the lower surface; the chamber wall members 10a used as a plurality of side surfaces provided therebetween; a gap 22a for seals formed toward the outside from the inside on at least one of joint surfaces joining one chamber wall member 10 with the other chamber wall member 10; a seal layer 50 having a sealant sealed in the gap 22a; and a screw hole provided at a predetermined interval on the joint surface of each chamber wall member 10 and for fastening both of the chamber wall members 10 and/or a bolt open hole corresponding with the screw hole and penetrating a bolt 40 from the joint surface to the opposite surface.</p>
申请公布号 JP2015175031(A) 申请公布日期 2015.10.05
申请号 JP20140053047 申请日期 2014.03.17
申请人 NAKAYA SEISAKUSHO:KK 发明人 HIRAKI SATORU
分类号 C23C14/00;C23C14/34;C23C16/44;H01L21/3065 主分类号 C23C14/00
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