发明名称 LIGHT-SOURCE DEVICE, DISCHARGE LAMP AND MANUFACTURING METHOD THEREFOR, AND EXPOSURE DEVICE
摘要 A light-source device for making a discharge lamp emit light, the discharge lamp having a glass tube in which an anode and a cathode are provided and a base part provided, for a light-emitting part of the discharge lamp, to each of the anode side and cathode side, wherein the light source device is provided with: a storage part for storing the discharge lamp; a support member for removably supporting the base parts of the discharge lamp; a clamp mechanism for removably coupling power cables to the base parts of the discharge lamp that are supported by the support member; and a lamp conveyance system for conveying the discharge lamp, by holding the base parts, between the storage part and the support member while the support of the base parts by the support member and the coupling of the power cables to the base parts by the clamp mechanism are released. The discharge lamp can be efficiently replaced.
申请公布号 WO2015147327(A1) 申请公布日期 2015.10.01
申请号 WO2015JP60026 申请日期 2015.03.30
申请人 NIKON CORPORATION 发明人 AOKI YASUO;KIKUCHI TAKAYUKI;SHIRASU HIROSHI
分类号 G03F7/20;F21S2/00;F21V19/00;F21Y101/00;H01J5/50;H01J61/52 主分类号 G03F7/20
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