| 发明名称 |
THIN FILM DEPOSITION EQUIPMENT |
| 摘要 |
<p>The present invention relates to a thin film deposition device comprising: a sensor to detect whether a crucible device moving by the driving power of a crucible moving device to be joined to a source injection device escapes from a moving path; and a control part to stop the crucible moving device when a detection signal is inputted from the sensor. Therefore, the thin film deposition device prevents the crucible device from escaping from the moving path and colliding with surroundings.</p> |
| 申请公布号 |
KR20150109168(A) |
申请公布日期 |
2015.10.01 |
| 申请号 |
KR20140032281 |
申请日期 |
2014.03.19 |
| 申请人 |
LIGADP CO., LTD. |
发明人 |
KIM, SUNG SU;KIM, HYUNG GYUN |
| 分类号 |
C23C16/52;C23C16/455 |
主分类号 |
C23C16/52 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
