发明名称 |
Handler Apparatus and Test Apparatus |
摘要 |
Provided is a handler apparatus that conveys a device under test to a test socket, including: a socket for adjustment which, prior to fitting of a device holder holding the device under test to the test socket, fits the device holder; a socket-for-adjustment position detecting section that detects a relative position of the device under test with respect to the socket for adjustment, in a state in which the device holder fits the socket for adjustment; an actuator that adjusts a position of the device under test on the device holder, based on the detected relative position of the device under test; and a conveyer that conveys the device holder, in which a position of the device under test has been adjusted, to fit the test socket. |
申请公布号 |
US2015276862(A1) |
申请公布日期 |
2015.10.01 |
申请号 |
US201414472392 |
申请日期 |
2014.08.29 |
申请人 |
ADVANTEST CORPORATION |
发明人 |
KIKUCHI Aritomo;YAMASHITA Tsuyoshi;AIZAWA Mitsunori;HORINO Hiromitsu;YAMADA Yuya;ONOZAWA Masataka |
分类号 |
G01R31/28;G01R1/04;G01C11/00 |
主分类号 |
G01R31/28 |
代理机构 |
|
代理人 |
|
主权项 |
1. A handler apparatus that conveys a device under test to a test socket, comprising:
a socket for adjustment which, prior to fitting of a device holder holding the device under test to the test socket, fits the device holder; a socket-for-adjustment position detecting section that detects a relative position of the device under test with respect to the socket for adjustment, in a state in which the device holder fits the socket for adjustment; an actuator that adjusts a position of the device under test on the device holder, based on the detected relative position of the device under test; and a conveyer that conveys the device holder, in which a position of the device under test has been adjusted, to fit the test socket. |
地址 |
Tokyo JP |