发明名称 DETECTING FAILURE OF SCANNING MIRROR
摘要 A method for monitoring includes providing a device (64) including a first part (46) and a second part (72) and a movable joint (70) connecting the first part to the second part. An electrical characteristic of a conductive path (80) crossing the movable joint is measured, and a remedial action is initiated in response to detecting a change of the electrical characteristic.
申请公布号 US2015276547(A1) 申请公布日期 2015.10.01
申请号 US201314433688 申请日期 2013.12.12
申请人 PRIMESENSE LTD. 发明人 Shpunt Alexander
分类号 G01M11/00;H01L21/306;B81B3/00;B81C1/00;G01N27/00;G01R31/02 主分类号 G01M11/00
代理机构 代理人
主权项 1. A method for monitoring, comprising: providing a device comprising a first part and a second part and a movable joint connecting the first part to the second part; measuring an electrical characteristic of a conductive path crossing the movable joint; and initiating a remedial action in response to detecting a change of the electrical characteristic.
地址 Tel Aviv IL