| 摘要 |
PROBLEM TO BE SOLVED: To provide a material of a wiring or an electrode, a wiring material to be formed on a substrate, preferably, enabling direct contact between an aluminum alloy thin film and a pixel electrode and excellent in alkali resistance. SOLUTION: The wiring or electrode 56 formed on the substrate 51 has a stack structure consisting of a first thin film 52 of a nitride-containing aluminum alloy and a second thin film 53 of an aluminum alloy in the order from the substrate 51. The proportion of nitrogen contained in the first thin film 52 is 13-50 atom%. COPYRIGHT: (C)2008,JPO&INPIT
|
