| 摘要 |
[Object] To provide a Fresnel's zone plate having a complex illumination function capable of improving resolution even when the outermost opaque band width cannot be reduced and an X-ray microscope using the Fresnel's zone plate. [Solution] A Fresnel's zone plate 1 having a complex illumination function according to the invention has opaque bands 3 and transparent bands 4 arranged alternately in the radial direction from the center concentrically on a flat transparent substrate 2 , and a transmission window 7 formed such that a portion of a plane wave vertically applied onto the upper surface vertically enters directly a sample 6 disposed below the Fresnel's zone plate 1 without dispersion.
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