ROLL ADJUSTING DEVICE, THIN FILM FORMING DEVICE AND THIN FILM MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a roll adjusting device capable of obtaining desired linear pressure distribution in addition to uniform linear pressure distribution, and to provide a thin film forming device having the roll adjusting device, and a thin film manufacturing method using the thin film forming device. SOLUTION: The roll adjusting device has an outer cell 1; an inner cell 2 provided in double pipe structure inside the outer cell 1; rubber 3 covering the inner cell 2; and a shaft 6 holding the inner cell 2. A forming roll 20 having coupling means 5 coupling the outer cell 1 and the shaft 6 at both ends of the outer cell 1 so that the outer cell 1 can be eccentric with respect to the inner cell 2, is moved relatively to another adjacently-arranged forming roll 21. The roll adjusting device also has a shaft moving mechanism 26 for moving the shaft 6, and an outer cell moving mechanism 46 for moving the outer cell 1. COPYRIGHT: (C)2008,JPO&INPIT