| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve detection sensitivity of a MEMS (Micro-Electrical-Mechanical-Systems) device having a movable part without an essential design change of the movable part. <P>SOLUTION: The device includes a frame part 12 of a square frame-shape where a contour of a top surface is substantially a rectangular shape; four beam parts 16 having one or more functional elements 17, each of the beam part includes a wedge-shaped neck part 19 with two sides 19b, which are opposed to each other and are connected to a main surface and a main surface 19a, on a first side and a second side; and the movable part 14 including projected parts 14b which are movably supported in an inner side region of the frame part by the beam part, each of the projected parts 14b is connected to each of four corner parts formed at a center part and a periphery side of the center part, and does not contact with the frame part and the beam part. <P>COPYRIGHT: (C)2008,JPO&INPIT |
