| 摘要 |
A levitation apparatus for use under vacuum or near vacuum conditions comprises a levitation plate ( 3 ) with a plurality of injection points ( 1 ) and adjacent suction points ( 2 ) for gas, creating an air bearing ( 4 ) and thereby supporting a thin plate-like substrate ( 5 ). Further embodiments comprise a transport mechanism for supported substrates and/or a tilting mechanism to incline the levitation plate.
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