PRESSURE SENSOR WITH RESISTIVE GAUGES

摘要

According to the invention the sensor is provided with a cavity (V) hermetically sealed on one side by a silicon substrate (40) and on the other side by a diaphragm (58) that can be deformed under the effect of the pressure external to the cavity, the sensor having at least one resistive gauge (54, 56) fastened to the diaphragm and having resistance that varies as a function of the deformation of the diaphragm. The diaphragm, preferably made of silicon nitride, is fastened to the resistive gauges. The gauges are located beneath the diaphragm inside the sealed cavity (V). It is unnecessary to etch the substrate to produce the cavity: the diaphragm is formed by depositing an insulating layer on a sacrificial layer, for example made of a polyimide, and may cover integrated measurement circuits in the silicon substrate.