TRANSFER PRODUCT, TRANSFER PRODUCT FABRICATING METHOD, AND TRANSFER PRODUCT ARRANGEMENT POSITION IDENTIFYING METHOD

摘要

Arrangement positions information on the positions of transfer products fabricated on the same substrate are identified without increasing the fabrication steps. A step of repetitively forming the patterns of transfer products drawn on one photomask by exposure on a substrate is conducted S times. At least two exposure steps of the S exposure steps are conducted to repetitively transfer the patterns of the transfer products by means of a photomask on which an identifier pattern different with the transfer product patterns is drawn. The number of patterns of the transfer products transferred at a time at one of that least two exposure steps is different from that at the other steps.