发明名称 |
Plasma confinement apparatus, and method for confining a plasma |
摘要 |
A plasma confinement apparatus, and method for confining a plasma are described and which includes, in one form of the invention, a plurality of electrically insulated components which are disposed in predetermined spaced relation, one relative to the others, and surrounding a processing region of a plasma processing apparatus, and wherein a plurality of passageways are defined between the respective insulated components; and at least one electrically conductive and grounded component forms an electrical field shielding for the processing region. |
申请公布号 |
US2007085483(A1) |
申请公布日期 |
2007.04.19 |
申请号 |
US20060546041 |
申请日期 |
2006.10.10 |
申请人 |
ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA |
发明人 |
NI TOM;CHEN JINYUAN;QIAN QING;FU YUEHONG;XU ZHAOYANG;ZHOU XUSHENG;WANG YE |
分类号 |
H01J7/24;C23C16/00;C23F1/00 |
主分类号 |
H01J7/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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