发明名称 SEMICONDUCTOR DEVICE INCLUDING FIELD EFFECT TRANSISTOR HAVING NONSYMMETRICAL STRUCTURE, AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method for the same which reduce the resistance of a drain region while suppressing the generation of hot carriers. SOLUTION: The semiconductor device includes a field effect transistor having a source region and a drain region formed in the surface region of a semiconductor silicon board. The drain region has a multiple impurity diffusion layer including at least a first conductive impurity diffusion layer and a second conductive impurity diffusion layer. A bird's beak under a gate electrode formed in the drain region is larger than a bird's beak under a gate electrode formed in the source region. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007103837(A) 申请公布日期 2007.04.19
申请号 JP20050294698 申请日期 2005.10.07
申请人 ELPIDA MEMORY INC 发明人 MANABE KAZUTAKA
分类号 H01L29/78 主分类号 H01L29/78
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