| 摘要 |
PROBLEM TO BE SOLVED: To reduce a deviation of a volume flow rate, which is caused by the individual variation of each of a plurality of micro fluid devices, of a fluid flowing in each of the plurality of micro fluid devices when the plurality of micro fluid devices are connected in parallel and operated while distributing/supplying the fluid to the plurality of micro fluid devices from a fluid driving mechanism such as one pump or a pressurized storage tank. SOLUTION: An integrated micro fluid device is characterized in that a correction pipeline is arranged in an individual pipeline portion of a branched connection pipeline, by which a flow passage inlet of each of the plurality of micro fluid devices having individual variations in pressure loss is connected to one fluid driving mechanism, from the branched portion of the branched connection pipeline to the flow passage inlet and/or at a flow passage outlet of each of the plurality of micro fluid devices, and the average pressure loss in the correction pipelines is 1-1,000 times the average pressure loss in the plurality of micro fluid devices, and the standard deviation of the pressure losses in the correction pipelines is within 5% of the average pressure loss in the correction pipelines. COPYRIGHT: (C)2007,JPO&INPIT
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