| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe unit capable of inspecting specimens in which electrodes are arranged at narrow intervals in any shape. SOLUTION: The probe unit is provided with a plurality of contact parts to be in contact with electrodes of specimens; a plurality of connection parts to be connected to external electrodes; a plurality of first guide parts for guiding the direction of movement of the contact parts; a plurality of spring parts for connecting to the contact parts and the connection parts, making the contact parts electrically continuous to the connection parts, and pressing the contact parts in a direction away from the connection parts; and a plurality of joint parts for insulating adjacent contact parts from each other, adjacent connection parts from each other, and adjacent spring parts from each other and joining the adjacent connection parts to each other. The probe unit is integrally formed by lithography. COPYRIGHT: (C)2007,JPO&INPIT
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