发明名称 A MEASUREMENT SYSTEM AND A METHOD
摘要 The invention provides a method and a measurement system. The method includes: providing a measurement model that includes measurement image information; locating a measurement area by utilizing the measurement image information; and performing at least one measurement to provide measurement result information.
申请公布号 WO2005036464(A3) 申请公布日期 2006.06.15
申请号 WO2004US33113 申请日期 2004.10.07
申请人 APPLIED MATERIALS ISRAEL, LTD.;APPLIED MATERIALS, INC.;TAM, AVIRAM 发明人 TAM, AVIRAM
分类号 G06T5/00;G06T7/00;G06T7/60 主分类号 G06T5/00
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