发明名称 |
A MEASUREMENT SYSTEM AND A METHOD |
摘要 |
The invention provides a method and a measurement system. The method includes: providing a measurement model that includes measurement image information; locating a measurement area by utilizing the measurement image information; and performing at least one measurement to provide measurement result information. |
申请公布号 |
WO2005036464(A3) |
申请公布日期 |
2006.06.15 |
申请号 |
WO2004US33113 |
申请日期 |
2004.10.07 |
申请人 |
APPLIED MATERIALS ISRAEL, LTD.;APPLIED MATERIALS, INC.;TAM, AVIRAM |
发明人 |
TAM, AVIRAM |
分类号 |
G06T5/00;G06T7/00;G06T7/60 |
主分类号 |
G06T5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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