Process of producing master carrier for magnetic transfer

摘要

A process for producing a master carrier contains steps of: forming a desired pattern on a support to form a resist pattern support; forming a first ferromagnetic thin film on the resist pattern support by a vacuum film forming method; forming a third ferromagnetic thick film on the first ferromagnetic thin film by an electroplating; and peeling the support from the resist pattern support provided with the first ferromagnetic thin film and the third ferromagnetic thick film.