| 摘要 |
PURPOSE:To display the position, size and shape of a defect by providing a defect detecting section, an arithmetic section, a storage section, an information processing section and a display section so as to find out an optional defect easily at a high speed. CONSTITUTION:A laser beam is collected from a laser generating source 31 of a defect detection section 3 movable on the surface of an object 1 to be measured fixed to a drive section 2. The reflected light of the collected laser light is led to a photodetector 34, where the light is subject to photoelectric conversion and a defect signal (a) corresponding to the change in the reflected luminous quantity is obtained by an amplifier 35. The signal (a) is given to a comparator 41 of an arithmetic section 4, where it is digitized while using a signal in excess of a reference value as a defect signal. A defect data signal (b) is obtained and a defect data based on the said signal (b) is stored in a storage section 5. Then an information processing section 6 reads the defect data, the size and shape of the defect are constituted as a picture and a picture signal (c) is outputted. The size and shape of the defect are displayed on a display section 7 from the signal (c).
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