| 摘要 |
PURPOSE:To easily hold a thin plate workpiece free from deformation by uniformly applying the high viscosity oil onto a chuck surface and mounting the workpiece onto the oil film and press-holding the workpiece, in a working device for a magnetic disc substrate, etc. CONSTITUTION:The prescribed quantity of high viscosity oil is supplied into a plurality of chuck grooves 17 on a chuck surface 22 from a feeding pipe 3 and uniformly applied onto the chuck surface 22, and a thin workpiece 6 is fitted onto a work spring-out preventing boss 4 of a chuck 1. Then, a main spindle 2, chuck 1, and the workpiece 6 are revolved integrally by the low speed drive of a main spindle motor, and pressed by a prescribed pressure by the roller 5a of a roller base 9, and then the workpiece 6 is perfectly held by the chuck 1. Then, the prescribed grinding work is carried out by shifting the roller base 9 and revolving the main spindle 2 at a high speed. Therefore, the thin workpiece can be held easily free from deformation, and the woring precision of the workpiece is hot deteriorated even if the workpiece is demounted from a work installation tool after working.
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