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发明名称
APPARATUS AND METHOD FOR NON-DESTRUCTIVE MEASUREMENT OF OHM RESISTANCE OF THIN FILM LAYER BY EDDY CURRENT
摘要
申请公布号
JPH01318976(A)
申请公布日期
1989.12.25
申请号
JP19890112763
申请日期
1989.04.30
申请人
LEYBOLD AG
发明人
SORUN GERUNOTSUTO
分类号
G01D5/16;G01N27/90;G01R27/02
主分类号
G01D5/16
代理机构
代理人
主权项
地址
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