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发明名称
METHOD OF FORMING COPPER WIRING
摘要
申请公布号
JPH04350939(A)
申请公布日期
1992.12.04
申请号
JP19910124169
申请日期
1991.05.29
申请人
SONY CORP
发明人
HOSHINO KAZUHIRO
分类号
H01L21/302;H01L21/3065;H01L21/3205;H01L23/52
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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