| 摘要 |
A network of cryopumps, each having an electronic regeneration controller, is coupled to a common rough pump. Each regeneration controller operates independently except that each is inhibited from opening its roughing valve to the common rough pump. Each regeneration controller only proceeds to open the roughing valve after it has received a token from a network interface terminal. The network interface terminal may control multiple groups of cryopumps coupled to respective common rough pumps. The regeneration controllers are removable modules connected to the cryopumps. A PROM is provided for each cryopump to the side of the connector opposite to the module. The PROM stores data specific to the cryopump and retains the data for the cryopump with replacement of the controller module.
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