CLEANING EQUIPMENT FOR SEMICONDUCTOR WAFER,申请号JP19910353936-传众专利搜索

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发明名称	CLEANING EQUIPMENT FOR SEMICONDUCTOR WAFER
摘要
申请公布号	JPH05166783(A)	申请公布日期	1993.07.02
申请号	JP19910353936	申请日期	1991.12.19
申请人	BABCOCK HITACHI KK	发明人	NOMURA MITSUGI
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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