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发明名称
摘要
申请公布号
JP4325139(B2)
申请公布日期
2009.09.02
申请号
JP20010342485
申请日期
2001.11.07
申请人
发明人
分类号
H01L29/161;H01L29/78;H01L21/20;H01L21/205;H01L21/324;H01L21/338;H01L29/778;H01L29/812
主分类号
H01L29/161
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代理人
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