发明名称 Method for forming a planar and vertical semiconductor structure having a strained semiconductor layer
摘要 Forming a semiconductor structure includes providing a substrate having a strained semiconductor layer overlying an insulating layer, providing a first device region for forming a first plurality of devices having a first conductivity type, providing a second device region for forming a second plurality of devices having a second conductivity type, and thickening the strained semiconductor layer in the second device region so that the strained semiconductor layer in the second device region has less strain that the strained semiconductor layer in the first device region. Alternatively, forming a semiconductor structure includes providing a first region having a first conductivity type, forming an insulating layer overlying at least an active area of the first region, anisotropically etching the insulating layer, and after anisotropically etching the insulating layer, deposing a gate electrode material overlying at least a portion of the insulating layer.
申请公布号 US7575975(B2) 申请公布日期 2009.08.18
申请号 US20050263120 申请日期 2005.10.31
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 THEAN VOON-YEW;CHEN JIAN;NGUYEN BICH-YEN;SADAKA MARIAM G.;ZHANG DA
分类号 H01L21/00;H01L21/8234;H01L21/84;H01L27/088 主分类号 H01L21/00
代理机构 代理人
主权项
地址