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发明名称
METHOD FOR PRODUCING THIN METAL-CONTAINING LAYERS HAVING A LOW ELECTRICAL RESISTANCE
摘要
申请公布号
EP1446831(B1)
申请公布日期
2009.07.22
申请号
EP20020774312
申请日期
2002.09.09
申请人
INFINEON TECHNOLOGIES AG
发明人
BARTH, HANS-JOACHIM
分类号
H01L21/768
主分类号
H01L21/768
代理机构
代理人
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