发明名称 Automated faraday sensor test system
摘要 A Faraday sensor test system includes a Faraday sensor configured to intercept a quantity of ions incident on said Faraday sensor, a primary conductor and a test conductor coupled to said Faraday sensor, and a controller. The controller is configured to automatically provide a test current into the test conductor in response to a test condition. The controller is further configured to receive a return current from the primary conductor in response to the test current and to compare the return current to a value representative of the test current to determine a condition of a conductive path comprising the test conductor, the Faraday sensor, and the primary conductor.
申请公布号 US7564048(B2) 申请公布日期 2009.07.21
申请号 US20060479397 申请日期 2006.06.30
申请人 VARIAN SEMICONDUCTOR E1QUIPMENT ASSOCIATES, INC. 发明人 DZENGELESKI JOSEPH P.;GIBILARO GREG;NORRIS GREGG;OLDEN DAVID;ONAT TAMER
分类号 G21K5/10 主分类号 G21K5/10
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