| 摘要 |
A metal complex of tridentate beta-ketoiminate is provided to form a conformal thin film on a substrate. A metal complex of tridentate beta-ketoiminate is denoted by structure formula A. In the structure formula A, M is calcium, strontium, barium, scandium, yttrium, lanthanum, titanium, zirconium, vanadium, tungsten, manganese, cobalt, iron, nickel, ruthenium, zinc, copper, palladium, platinum, iridium, rhenium or osmium. R1 is selected from alkyl, alkoxyalkyl, fluoreoalkyl, cycloaliphatic and aryl of 1-10 carbon atoms. R2 is selected from hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl. R3 is linear or branch type selected from alkyl, alkoxyalkyl, fluoreoalkyl, cycloaliphatic and aryl. R4 is branch type alkyl or akylene bridge having one or more chiral center. R5 and R6 are linear or branch type selected from alkyl, fluoroalkyl, cycloaliphatic, and aryl.
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