APPARATUS FOR MEASURING DIELECTRIC PROPERTIES OF PARTS
摘要
A chamber formed from an electrically conductive material is connected to a ground potential. A hot electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation and is physically separated from the chamber. The hot electrode includes a top surface defined to support a part to be measured. A radiofrequency (RF) transmission rod is connected to extend from a bottom surface of the hot electrode through an opening in a bottom of the chamber and be physically separated from the chamber. The RF transmission rod is defined to transmit RF power from a conductor plate in an electrical components housing to the hot electrode. An upper electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation. The upper electrode is electrically connected to the chamber and is defined to be movable in a vertical direction.
申请公布号
WO2009048517(A2)
申请公布日期
2009.04.16
申请号
WO2008US11319
申请日期
2008.09.30
申请人
LAM RESEARCH CORPORATION;KIM, JAEHYUN;SATO, ARTHUR, H.;COMENDANT, KEITH;LIU, QING;WU, FEIYANG
发明人
KIM, JAEHYUN;SATO, ARTHUR, H.;COMENDANT, KEITH;LIU, QING;WU, FEIYANG