发明名称 APPARATUS FOR MEASURING DIELECTRIC PROPERTIES OF PARTS
摘要 A chamber formed from an electrically conductive material is connected to a ground potential. A hot electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation and is physically separated from the chamber. The hot electrode includes a top surface defined to support a part to be measured. A radiofrequency (RF) transmission rod is connected to extend from a bottom surface of the hot electrode through an opening in a bottom of the chamber and be physically separated from the chamber. The RF transmission rod is defined to transmit RF power from a conductor plate in an electrical components housing to the hot electrode. An upper electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation. The upper electrode is electrically connected to the chamber and is defined to be movable in a vertical direction.
申请公布号 WO2009048517(A2) 申请公布日期 2009.04.16
申请号 WO2008US11319 申请日期 2008.09.30
申请人 LAM RESEARCH CORPORATION;KIM, JAEHYUN;SATO, ARTHUR, H.;COMENDANT, KEITH;LIU, QING;WU, FEIYANG 发明人 KIM, JAEHYUN;SATO, ARTHUR, H.;COMENDANT, KEITH;LIU, QING;WU, FEIYANG
分类号 H01L21/66 主分类号 H01L21/66
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