QUARTZ OSCILLATOR, AND MASS/VOLUME MEASURING DEVICE AND MASS/VOLUME MEASURING METHOD USING IT

摘要

PROBLEM TO BE SOLVED: To provide a mass/volume measuring device capable of measuring simultaneously the mass and the volume of a measuring object generating thin film interference light. SOLUTION: This mass/volume measuring device has a mass measuring means having a quartz oscillator, for measuring the mass of the measuring object adhering onto an electrode of the quartz oscillator based on a frequency change; and a volume measuring means having a light irradiator for irradiating light to the measuring object on the electrode of the quartz oscillator, for measuring the volume of the measuring object based on interference light generated by reflected light of irradiated light. COPYRIGHT: (C)2009,JPO&INPIT