| 摘要 |
An excimer lamp is provided to utilize effectively vacuum ultraviolet ray including a light of 170nm or 150nm by using UV reflection film having the concentration of below 70wtppm. A discharge vessel(11) is made of a silica glass, and a pair of electrodes(15,16) is installed at the discharge vessel. An xenon gas is sealed within a discharge space(S) of the discharge vessel, and an ultraviolet reflection film(20) is formed on the exposed surface to the discharge space of the discharge vessel while including silicon, aluminum and impurity metal. The concentration of an impurity metal is 700wtppm or less.
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