<p>A method of: directing an exposing light through an optical diffuser; directing the diffused light though a photomask having transparent areas corresponding to a gray-tone pattern; directing the masked light onto a photoresist material on a substrate; developing the photoresist to produce a three dimensional structure in the photoresist.</p>
申请公布号
WO2009048896(A1)
申请公布日期
2009.04.16
申请号
WO2008US79121
申请日期
2008.10.08
申请人
THE GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE NAVY;CHRISTOPHERSEN, MARC;PHLIPS, BERNARD
