| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection device and method for suppressing an error of measurement data caused by variation of elements. <P>SOLUTION: The inspection device 100 comprises an XYθ table 102 for mounting a sample to be inspected, a line sensor 105 for imaging an optical image of the sample to be inspected by using a plurality of the light receiving elements, which are aligned in a second direction orthogonal to a first direction, and relatively move with respect to the XYθ table 102, an accumulation part 132 for accumulating respective pixel data, which is redundantly imaged by the line sensor 105 in a position shifted to the second direction by pixel unit, on each pixel, and a comparison part 139 for comparing the accumulated pixel data on each pixel and predetermined reference data. The pixel data imaged by the different light receiving elements are accumulated on each pixel, and thus variation of characteristics of the elements can be averaged. <P>COPYRIGHT: (C)2009,JPO&INPIT |
