A salt suitable for an acid generator and a chemically amplified resist composition containing the same,申请号EP20060013261-传众专利搜索

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发明名称	A salt suitable for an acid generator and a chemically amplified resist composition containing the same
摘要
申请公布号	EP1873143(B1)	申请公布日期	2009.04.15
申请号	EP20060013261	申请日期	2006.06.27
申请人	SUMITOMO CHEMICAL COMPANY, LIMITED	发明人	YOSHIDA, ISAO;HARADA, YUKAKO;YAMAGUCHI, SATOSHI;ANDO, NOBUO
分类号	C07C309/17;H01L21/027	主分类号	C07C309/17
代理机构		代理人
主权项
地址

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