| 摘要 |
The present invention has a purpose of providing a tube connecting apparatus capable of stably, accurately executing control of wafer temperature even when connecting of tubes is conducted continuously. A tube connecting apparatus ( 1 ) includes a heater ( 70 ) for heating a wafer holder ( 5 a), a thermister ( 71 ) which detects the temperature of the wafer holder ( 5 a), a heater heating control device ( 69 ) which controls the heater ( 70 ) based on output of the thermister ( 71 ), and a wafer heating control device ( 68 ) which performs heating control of a wafer ( 6 ) through constant power control. Before the start of heating the wafer ( 6 ) by the wafer heating control device ( 68 ), the control of the heater ( 70 ) is performed by the heater heating control device ( 69 ) for temperature control so that the wafer holder ( 5 a) is heated to a fixed temperature (about 65° C.). |
