HOLE FORMING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To easily form a micro hole at a high aspect ratio.

SOLUTION: This hole forming device 10 comprises a frame body 46 for supplying liquid polishing agent 48 to a hole forming target position on a workpiece 50, a rotor-shaped polishing tool 30 extending in the axial direction, and a tool supporting part 20 for making the polishing tool 30 abut at its front end on the hole forming target position in the axial direction while rotating it around its axis.

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