| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a conductive pad (conductive sheet) excellent in planarization characteristics and exhibiting high polishing speed while suppressing the occurrence of scratch. <P>SOLUTION: The conductive pad includes a laminated sheet formed by laminating a metal sheet on one side of a resin sheet containing thermoplastic resin and/or thermoplastic elastomer, wherein the laminated sheet has a large number of recesses penetrating the resin sheet and a large number of through holes penetrating the resin sheet and the metal sheet, and a conductive area is formed of tin or a tin alloy in the recess. <P>COPYRIGHT: (C)2009,JPO&INPIT |
