SUBSTRATE HEAT TREATMENT FURNACE

摘要

PROBLEM TO BE SOLVED: To provide a substrate heat treatment furnace capable of decomposing an organic substance included in the hot air discharged by heating treatment with high efficiency. SOLUTION: The heating treatment of a glass substrate W is progressed by distributing the hot air into a furnace main body portion 10. The hot air discharged from the furnace main body portion 10 is returned to the furnace main body portion 10 through a circulation passage 20. On the way of the passage, a part of the hot air is discharged to an exhaust line 23. The exhaust line 23 is provided with a catalytic filter portion 71 constituted by retaining catalyst on a metal filter. Thus the contact efficiency of the discharged hot air and the catalyst is increased, and decomposition efficiency of the organic substance can be improved. Further the particle-shaped organic substance can be also collected, so that the decomposition efficiency of the organic substance can be totally improved. COPYRIGHT: (C)2009,JPO&INPIT