| 摘要 |
<p>In one embodiment, an end effector having a first arm extending from an end effector support body, and a second arm extending from the end effector support body is provided, The first ami and the second arm have support extensions for supporting a peripheral region of a substrate, wherein the second arm and the first arm include sensors integrated thereon. The sensors are located at a distal end of the first and the second arms past the corresponding support extensions. The sensors are configured to indicate whether support arms for a container are within the travel path of the end effector in one embodiment. The end effector may be integrated into a system for transporting substrates.</p> |
