发明名称 ADJUSTMENT OF TILT ANGLE OF JETTING PORT AND AIR QUANTITY OF SUCTION PORT OF AIR CLEANER HEAD
摘要 PROBLEM TO BE SOLVED: To solve the problem that the operation rate in production line processes decrease since the conventional air cleaner device has limits in release efficiency of stuck fine dust and collection efficiency of scattered fine dust, and in addition, causes chattering (abnormal vibration). SOLUTION: Air cleaner heads 20 and 21 of an upper stage and a lower stage are provided with an inclined jetting port 22 inclined at 30 to 80°with respect to a horizontal surface and also provided with an air quantity control valve 24 for controlling balance in suction air quantity between a suction port (1)13 and a suction port (2)14 to adjust a suction air quantity. A jet flow strikes straight on the lower side of stuck fine dust 17 on a plane plate 19 without being bent halfway to facilitate releasing and then improve collection efficiency. Further, the travel direction of the plane plate 19 is aligned with the direction of the jet flow from the inclined jetting port 22 and then the plane plate 19 can smoothly travel with assistance of pushing operation, so that stable production can be carried out without chattering (abnormal vibration) nor a temporary stop of the production line. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009076831(A) 申请公布日期 2009.04.09
申请号 JP20070271798 申请日期 2007.09.20
申请人 MIYATA KUNIO 发明人 MIYATA KUNIO
分类号 H01L21/304 主分类号 H01L21/304
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